A high precision slit in ultra-high vacuum is designed to develop a good performance soft X-ray interference lithography (XIL)\nbeam line at Shanghai Synchrotron Radiation Facility (SSRF). In order to define the secondary source and enhance the performance\nof the beam line,many technical difficulties need resolving to design the precision slit.Therefore, to obtain reasonable design scheme,\nit is necessary to analyze the structural characteristics, the movement situation, the force state, the thermal load state, and the\ncooling state of the precision slit deeply by numerical simulation. The simulation results and the testing results demonstrate that\nthe mechanical precision of the slit is at a high level and satisfies the requirements of the beam line.
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